Damping analysis to improve the performance of shunt capacitive RF MEMS switch

This paper describes the significance of iterative approach and structure damping analysis which help to get better performance validation shunt capacitive RF MEMS switch. The micro-cantilever based electrostatic ally actuated switch is designed after multiple iterations on cantilever a modification obtained that requires low actuation voltage 7.3 V for 3 ?m deformation. To validate we have performed each iteration. consequence identifying critical membrane thickness 0.7 ?m, incorporating two slots holes into membrane. in stress distribution. We Eigen frequency micro machined CPW transmission line with Gap- Strip-Gap (G-S-G) 85 - 70 ?m. isolation properties are analyzed high dielectric constant thin films i.e., AlN, GaAs, HfO2. For all shows -63.2 dB, but there shift radio frequency. Because presence exhibits very insertion loss -0.12 dB.